New Heteroleptic Copper(II) Complexes as MOCVD Precursors
نویسندگان
چکیده
منابع مشابه
Rare earth β-diketonate and carboxylate metal complexes as precursors for MOCVD of oxide films
Volatile and thermostable complexs of lanthanide acetylacetonates and pivalates were obtained and investigated by different methods. These compounds were used for lanthanide oxide containing film producing and for fabrication of silica optical fibers doped by lanthanide oxide. The properties of these and already known volatile precursors are compared. It is well recognized that rare earth conta...
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ژورنال
عنوان ژورنال: Physics Procedia
سال: 2013
ISSN: 1875-3892
DOI: 10.1016/j.phpro.2013.07.065